Cleanroom Faculty/Staff Meeting

NSERL Conference Room 1.744

All, Going forward, this meeting will be held on the first Monday of every month Sponsors can request additional meetings during any month if the need arises.


Wallace Martin

The University of Texas at Dallas
Associate Director - Cleanroom Research Laboratory
Office: 972 883-4302                                       


                    In case you didn't recieve your email, you need to know.


                      Raith E-beam Litho User Fees


To: All Cleanroom users and sponsors

Beginning in January, 2013 the Cleanroom will start charging hourly user fees for the new Raith 150 high resolution e-beam writer. We need to recover ~$100K / year to support the annual service contract and to help purchase expensive consumables such as e-beam photoresist. Initially, internal UTD researchers will be charged $50 / hour. External customers (industrial & academic) will pay more. Based upon usage, the fees will be adjusted up or down as appropriate. The internal UTD starting point of $50 / hour was established from recent use data.

Billing will be monthly. Data for billing will be taken from the online tool reservation software and logbook entries.

Data from a recent 14 day period:Average use Time 6.99 hr
Number of Runs longer than 4 hours 13
Total number of runs 28
% long runs 46 %
Number of short runs 15
Average short runs (<4 hr) 2.614583 hr
Runs per day avg 2.071429


Wallace Martin                         AFM / SPM User Fees                    

To: Sponsors of Cleanroom users,

In order to support the cost of maintaining and repairing the Cleanroom Veeco Dimension 5000 AFM/SPM, we plan to charge "user"fees begininning January 1, 2012. We need to generate approximately $15K / year to cover routine maintenance, repairs, and to purchase / inventory tapping mode tips. We've determined, from use history, that a fee of $40 / use should generate enough money to purchase a basic maintenance contract and a one year supply of tapping mode tips. Note that the $40 fee will be charged on a "per/use" basis (not an hourly charge). AFM user fees will be collected monthly; Vickie Lincoln will email invoice statements to each sponsor, (copy to AA staff). Invoice will list user name, number of uses during period. Vickie will then prepare auto journal entry to people soft accordingly.


Wallace Martin

Associate Director - Cleanroom Research Laboratory

972-883-4302 office phone



                                            Mask Writing Fees

Heidelberg DWL 66 Laserwriter Mask Writing Fees  (for UTD CRL users)


Dear Users and Sponsors,


Please see this link regarding fees for mask making using the cleanroom laser writer tool. To keep your costs to a minimum, I encourage you to carefully verify your mask design in advance of using the tool.

 Let me know if you have any questions.




Bob W


Robert M. Wallace, Ph.D.

Professor of Materials Science and Engineering,

Electrical Engineering and Physics






                                                   Online Tool Reservations


We will start using online software for making tool reservations. The Temescal e-gun evaporator will be used as the initial test case. Other tools will be added after we make sure the “online scheduler” is working properly. We are using the same software that is currently being used for the E-Test lab on the 3rd floor. Online reservations must be made for every process run even if you walk into the Cleanroom and find the tool available. The Leica INM 200 microscope computer in bay 2 (litho) is connected to the network and can be used to access the Cleanroom website. A laptop with wireless connectivity can also be used. You will find the “Tool Reservation” link at the top of the Cleanroom home page http://www.utdallas.edu/research/cleanroom/.

What to do: 

  • Follow the links to the registration page.

  • Your UTD email address is your logon name.

  • Establish a six character password.

  • Once you complete the registration, permission to use the system will be granted within 24 hours or sooner.

  • You will receive email confirming registration, permission, and when reservations are made.

What to do after permission is granted:

  • When logged on to the Reservation System, a control panel page will appear. Use “BOOKINGS” to reserve time.

  • A green square will appear upon the calendar when clicking on the time and date you want to reserve.

  • Double click and a window will open allowing you to enter start and end times for your reservation.


For questions, contact John Maynard (972)883-2125 or use the help function on the Reservations System. Please start the registration process now.


Updated: 2015-08-28