Roger Robbins
Process Engineer
and Lord High, Chief Safety Officer of the Entire Clean Room

Clean Room Research Staff
Department of Electrical Engineering
University of Texas at Dallas

800 N. Campbell Road
Richardson, Texas 75083
Phone: Office (972)883-6739 Fax (972) 883-6629


Ph.D. 1973, Texas Tech Univ. Physics
M.S. 1970, Texas Tech Univ. Physics
B.A. 1966, Texas A&M Univ. Physics


Short History:  Dr. Roger Robbins is a processing engineer at the University of Texas at Dallas Clean Room Labs teaching Semiconductor processing and equipment techniques to graduate students.  He is a physicist with a 28 year career in the semiconductor industry with Texas Instruments.  Early in his career, he worked in the e-beam lithography tool development program using expertise in electronics, electron optics, electron gun design, and electron optics distortion correction, as well as e-beam lithography process development.  For a short while he was Manager of the Research and Development Department at Nikon Precision Inc. developing integrated systems for the Nikon optical step and repeat camera for the semiconductor industry.  Then he returned to Texas Instruments and designed Plasma processing equipment in the Process Automation Center.  He also developed deep UV resist processes for 0.18 micron optical lithography in the Silicon Product Development Center at TI.  Later, he moved into the Digital Imaging Division and designed the mirror lubrication process and the application equipment that allows the DLP device to operate in optical projectors with no mirror defects.  He is currently on the technical board of directors for two start-up companies.


May, 2007, Roger Robbins, University of Texas at Dallas