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UNDER RECONSTRUCTION (slowly...)   Updated: 10/97

RF I-V signals versus time to an ICP discharge.

RF I-V signals versus time to an ICP discharge.

SF6, 10 mTorr, 60 W

1 ms period,

50% duty cycle

The current and voltage

do not reach steady

state until approximately

10 ms into the turn-on.

The discharge electron

density has become

large enough at this

point for the glow to

accept inductive coupled

power reasonably

efficiently.

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