DATE:	8/21/2009		Operator	John Maynard
Process:	Temescal E-gun: Aluminum
Target	3000A
TEMPC:	25
WAFER:	4" SILICON
SIZE	100mm	Substrate:	<100>
LOAD	1	Comment:
Run	2946	TOP	LEFT	FLAT	RIGHT	Mean	S1 Dev	+ or - %	HI-LO%
1	3024	3104	3008	3025	3080	3048.2	41.43	1.36	1.57
					Sheet R	0.281	+ / - %	2.31	Ohm/sq
					Resistivity	8.57E-06	Ohm-cm
					Bulk Al	2.82E-06	Ohm-cm