| DATE: | 5/15/2009 | Operator | John Maynard | ||||||
| Process: | Temescal E-gun: Aluminum | ||||||||
| Target | 3000A | ||||||||
| TEMPC: | 25 | ||||||||
| WAFER: | 4" SILICON | ||||||||
| SIZE | 100mm | Substrate: | <100> | ||||||
| LOAD | 1 | Comment | |||||||
| Run | 2946 | TOP | LEFT | FLAT | RIGHT | Mean | S1 Dev | + or - % | HI-LO% |
| 1 | 3076 | 2996 | 3020 | 3004 | 3023 | 3023.8 | 31.24 | 1.03 | 1.32 |
| Sheet R | 0.326 | + / - % | 2.17 | Ohm/sq | |||||
| Resistivity | 9.86E-06 | Ohm-cm | |||||||
| Bulk Al | 2.82E-06 | Ohm-cm | |||||||