| DATE: | 2/25/2009 | Operator | John Maynard | ||||||
| Process: | Temescal E-gun: Aluminum | ||||||||
| Target | 3000A | ||||||||
| TEMPC: | 25 | ||||||||
| WAFER: | 4" SILICON | ||||||||
| SIZE | 100mm | Substrate: | 100 | ||||||
| LOAD | 1 | Comment | |||||||
| Run | CENTER | TOP | LEFT | FLAT | RIGHT | Mean | S1 Dev | + or - % | HI-LO% |
| 1 | 3342 | 3002 | 3249 | 3356 | 3194 | 3228.6 | 143.22 | 4.44 | 5.48 |
| Sheet R | 0.232 | + / - % | 1.04 | Ohm/sq | |||||
| Resistivity | 7.49E-06 | Ohm-cm | |||||||
| Bulk Al | 2.82E-06 | Ohm-cm | |||||||