| DATE: | 12/12/2008 | Operator | Keith Bradshaw | ||||||
| Process: | Temescal E-gun: Aluminum | ||||||||
| Target | 3000A | ||||||||
| TEMPC: | 25 | ||||||||
| WAFER: | 4" SILICON | ||||||||
| SIZE | 100mm | Substrate: | 100 | ||||||
| LOAD | 1 | Comment | Sheet resistance = 229.8 mOhm/sq +-1.03% | ||||||
| Run | CENTER | TOP | LEFT | FLAT | RIGHT | Mean | S1 Dev | + or - % | HI-LO% |
| 1 | 2678 | 2659 | 2689 | 2635 | 2637 | 2659.6 | 24.08 | 0.91 | 1.02 |
| Sheet R | 0.2298 | + / - % | 1.03 | Ohm/sq | |||||
| Resistivity | 6.11E-06 | Ohm-cm | |||||||
| Bulk Al | 2.82E-06 | Ohm-cm | |||||||