| DATE: | 11/13/2008 | Operator | John Maynard | ||||||
| Process: | Temescal E-gun: Aluminum | ||||||||
| Target | 1000A | ||||||||
| TEMPC: | 25 | ||||||||
| WAFER: | 4" SILICON | ||||||||
| SIZE | 100mm | Substrate: | 100 | ||||||
| LOAD | 1 | Comment | Sheet resistance = 1255 mOhm/sq +-1.37% | ||||||
| Run | CENTER | TOP | LEFT | FLAT | RIGHT | Mean | S1 Dev | + or - % | HI-LO% |
| 1 | 1084 | 893 | 966 | 902 | 990 | 967.0 | 77.33 | 8.00 | 9.88 |
| Sheet R | 1.255 | + / - % | 1.37 | Ohm/sq | |||||
| Resistivity | 1.21E-05 | Ohm-cm | |||||||
| Bulk Al | 2.82E-06 | Ohm-cm | |||||||