| DATE: | 4/13/2009 | RECIPE: | PDIF1000.008 | Operator | Gordon | ||||
| TUBE: | Tystar T8 | ||||||||
| Process: | 1000C N+ Diffusion | ||||||||
| TEMPL: | 1000 | Time | 30 | min | |||||
| TEMPC: | 1000 | GAS | N2 | ||||||
| TEMPS: | 1000 | FLOW | 3 l/min | ||||||
| WAFER: | P-Type 10 Ohm/cm | ||||||||
| SIZE | 100mm | Substrate: | <100> | ||||||
| LOAD | 5 | Comment | Prometrix 4pt Probe Sheet Resistance | ||||||
| POSITION | Average | + or - % | |||||||
| 13 | 9.64 | 2.07 | Ohm/Sq | ||||||