| DATE: | 6/9/2009 | RECIPE: | DOX10NM.006 | Operator | Burris | ||||
| TUBE: | Tystar T6 | ||||||||
| Process: | 10 nm gate oxide | ||||||||
| TEMPL: | 900 | Oxidation | 19.33 | min | |||||
| TEMPC: | 900 | GAS | O2 | ||||||
| TEMPS: | 900 | FLOW | 3 l/min | ||||||
| WAFER: | P-Type 10 Ohm/cm | ||||||||
| SIZE | 100mm | Substrate: | <100> | ||||||
| LOAD | 5 | Comment | Ellipsometer = 103 A center | ||||||
| POSITION | CENTER | TOP | LEFT | FLAT | RIGHT | Mean Avg | S1 Dev | + or - % | HI-LO% |
| 13 | 103 | 102.4 | 103.8 | 104.5 | 103.5 | 103.4 | 0.80 | 0.77 | 1.02 |