| DATE: | 3/31/2009 | RECIPE: | DOX10NM.006 | Operator | Gordon | ||||
| TUBE: | Tystar T6 | ||||||||
| Process: | 10 nm gate oxide | ||||||||
| TEMPL: | 900 | Oxidation | 19.33 | min | |||||
| TEMPC: | 900 | GAS | O2 | ||||||
| TEMPS: | 900 | FLOW | 3 l/min | ||||||
| WAFER: | P-Type 10 Ohm/cm | ||||||||
| SIZE | 100mm | Substrate: | <100> | ||||||
| LOAD | 5 | Comment | Ellipsometer = 100.4 A center | ||||||
| POSITION | CENTER | TOP | LEFT | FLAT | RIGHT | Mean Avg | S1 Dev | + or - % | HI-LO% |
| 13 | 100.4 | 99.9 | 98.7 | 99.3 | 101.8 | 100.0 | 1.18 | 1.18 | 1.55 |