| DATE: | 9/2/2009 | RECIPE: | DOX900C.005 | Operator | Gordon | ||||
| TUBE: | Tystar T5 | ||||||||
| Process: | 10 nm gate oxide | ||||||||
| TEMPL: | 900 | Oxidation | 19.33 | min | |||||
| TEMPC: | 900 | GAS | O2 | ||||||
| TEMPS: | 900 | FLOW | 3 l/min | ||||||
| WAFER: | P-Type 10 Ohm/cm | ||||||||
| SIZE | 100mm | Substrate: | <100> | ||||||
| LOAD | 3 | Comment | Ellipsometer = 103.4 A center | ||||||
| POSITION | CENTER | TOP | LEFT | FLAT | RIGHT | Mean Avg | S1 Dev | + or - % | HI-LO% |
| 13 | 102.4 | 106.5 | 102.6 | 101.7 | 105.1 | 103.7 | 2.04 | 1.97 | 2.32 |