| DATE: | 3/31/2009 | RECIPE: | DOX900C.005 | Operator | Gordon | ||||
| TUBE: | Tystar T5 | ||||||||
| Process: | 10 nm gate oxide | ||||||||
| TEMPL: | 900 | Oxidation | 19.33 | min | |||||
| TEMPC: | 900 | GAS | O2 | ||||||
| TEMPS: | 900 | FLOW | 3 l/min | ||||||
| WAFER: | P-Type 10 Ohm/cm | ||||||||
| SIZE | 100mm | Substrate: | <100> | ||||||
| LOAD | 5 | Comment | Ellipsometer = 99.9 A center | ||||||
| POSITION | CENTER | TOP | LEFT | FLAT | RIGHT | Mean Avg | S1 Dev | + or - % | HI-LO% |
| 13 | 99.9 | 101.2 | 99.2 | 98.5 | 99.7 | 99.7 | 1.00 | 1.00 | 1.35 |